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Turbo Molecular Pump : SHIMADZU CORPORATION Turbo Molecular Pumps (TMP) create the vacuum environment that is indispensable for the manufacturing processes of solar cells and semiconductors Boasting the highest level of exhaust capacity in the world, Shimadzu's product lineup is designed to meet the layer deposition and fabrication requirements of solar cell modules and silicon wafers, both of which are becoming increasingly large
Turbomolecular pumps maintenance and operation guidelines Turbomolecular pumps and frequency converters are nearly maintenance free An exchange of ceramic bearings is recommended every 2 years and can be done by our field service or trained and qualified customers Maintenance free turbomolecular pumps include those with contact-free, magnetic bearing technology, with 5-axis active magnetic bearing and drive system, which combines reliability and
BALL BEARINGS FOR TURBOMOLECULAR PUMPS - GlobalSpec Luckily, Alpine Bearing has teamed up with the world’s best bearing manufacturers to develop replacement bearings for both ball bearing and magnetic levitation (maglev) turbo molecular pumps
Turbo Pump Basics: Installation, Operation, Start Stop Venting The bearing purge delivers a low pressure, low flow (10 or 20 sccm) of inert gas directly to the Turbo-molecular pump’s bearings, preventing particles from entering the bearings, and corrosive gases from degrading the bearing lubricant
Vibration Problems in a Turbo Molecular Pump with Active Magnetic Bearings 1 Introduction Turbo molecular pumps are important in obtaining and maintaining high vacuum, and widely used in a variety of high vacuum applications Active magnetic bearings (AMBs) are attractive for their special advantage compared with traditional ball bearings and fluid film bearings, such as contactless, no wear, no oil, low power consumption, low maintenance cost, and controllability of
Ball bearings vacuum equipment - GMN Optimized engineering GMN develops customer-specific high-precision ball bearings with special dimensions, designs and cages for turbo molecular pumps Significant performance criteria are: Product optimized bearing design Use of covered bearings to protect against contamination and to increase life Ceramic balls for higher speeds, minimal friction and optimized bearing dynamics Integrated
Design aspects of a large scale turbomolecular pump with active . . . A sliding mode control with time-varying hyperplane for AMB system is proposed and successfully carried out experiments using a turbomolecular pump [17] A strategy of variable bias current control is developed to minimize the power consumption of active magnetic bearings (AMB) used in Turbomolecular pumps [18]