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Expertech | Expert Semiconductor Technology - Exper-Tech Founded in 1992 to address market needs for the support of established thermal processing systems, the company has grown to focus on process tooling for all your Thermal Processing needs, within many Semiconductor markets Expertech supports three primary platforms within this segment – Compact, Vertical and Large Batch Horizontal
VTR7000PLUS Thermal Reactor | Vertical Diffusion Furnaces - Expertech A highly automated reactor with robust design features and a small footprint, Expertech’s VTR system is one of the most well-known furnace designs worldwide The VTR7000PLUS offers exceptional within-wafer and wafer-to-wafer uniformity in atmospheric and LPCVD processes
About Expertech - Exper-Tech Expertech is a manufacturer of diffusion furnaces offering over 30 years of experience Beyond spare parts and reactor systems, we can provide high-quality refurbishing services, repair and maintenance, and OEM training sessions to ensure the longevity and performance of your thermal reactors
HTR HTR-RF Series Horizontal Furnaces - Expertech Expertech’s horizontal furnaces deliver high production throughput and reliability through premium features Featuring a proven design and easy maintainability, the HTR and HTR-RF class of diffusion furnaces provide the solutions you need for high-quality thermal processing applications
Expertech | Thermal Reactor Experts - Exper-Tech With hundreds of fully designed and manufactured systems by Expertech and an additional 500 refurbished systems in the field, Expertech has earned a reputation as an industry leader for thermal diffusion furnaces
Diffusion Furnace Applications for MEMS and Semiconductors - Expertech Expertech manufactures CTR and VTR diffusion furnaces for processing MEMS devices With high-technology features, the CTR and VTR systems deliver exceptional film uniformity, high-performance LPCVD and atmospheric capabilities, and lower intrinsic stress to process MEMS devices, including small-scale sensors, actuators, and more
Why Choose Expertech for Your Thermal Processing Equipment Expertech offers over 30 years of experience manufacturing the latest diffusion furnaces and refurbished systems We have supplied over 1500 furnace process tubes and more than 100 vertical furnaces
Contact Us - Exper-Tech Thank you for your interest in Expertech Please fill out the following form and we will be contacting you shortly Expertech 10 Victor Square, Suite 100 Scotts Valley, CA 95066 831-439-9300