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Electron Probe Microanalysis | Materials Research Institute Electron Probe MicroAnalysis (EPMA) is a non-destructive technique to determine chemical composition of small amounts of solid materials A focused beam of high-energy electrons hits the sample and generates characteristic x-rays corresponding to the elements present in the material
Electron probe microanalysis - Wikipedia The device used for this technique is known as an electron probe microanalyzer (also abbreviated EPMA), often shortened to electron microprobe (EMP) or electron probe (EP) In EPMA, the instrument bombards the sample with a high-intensity electron beam, which then emits X-rays