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- Computational lithography | ASML
Our computational lithography techniques optimize the scanner, masks and processes for device manufacturability and yield, both early in design and technology development and later in high-volume production
- Machine Learning in Computational Lithography
Especially since ASML led the way into computational lithography, albeit with plenty of customer pull Machine learning brings revolution to many applications! Can machine learning be the moonshot for us? We have been doing machine learning for a long time Next Gen?
- Computational lithography: Driving nanometer precision in microchip . . .
Layer by layer, chip by chip, wafer by wafer, computational lithography is enabling chipmakers to push microchip technology to new limits Learn more about computational lithography:
- Chips industry, ASML and Photonics Optics - DutchPhotonicsEvent
Optical Metrology Computational Lithography Metrology Illumination Reticle Wafer Computational Lithography (Optimization of Illumination and Reticle for optimal printing) Thank you! Maarten Voncken Director Research Metrology maarten voncken@asml com
- ML for Computational Lithography: Practical Recipes
Which lithography applications are more promising with ML? When training samples are sparse, do we still use ML? MB model (e g ) Etch bias = C0 + C1Den + C2Vis + C3Blo + C4Den2 + S Shim and Y Shin, “Machine learning-guided etch proximity correction,” IEEE Tr on Semiconductor Manufacturing, Feb 2017
- Holistic lithography in the age of the Artificial Intelligence of Things
The key enabler continues to be affordable scaling, driven by advanced lithography, computational capabilities, fast metrology and inspection In his keynote, ASML President and CTO Martin van den Brink will look at the key developments across ASML’s holistic product portfolio
- Holographic Lithography Simulations drive the ASML EUV roadmap
Lithography is the only semiconductor production step to process the wafer die per die, in contrast with all other production steps This makes ASML’s technology so pivotal in getting the highest yield and best performance in chip manufacturing
- Tech Talk: Yu Cao, ASML, Spring Edition 2019 - YouTube
From the eBeam Initiative luncheon event at the 2019 SPIE Advanced Lithography Conference, Yu Cao of ASML explores applications of machine learning in computational lithography
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